| abstract |
An electrostatic chuck (1A) comprises a susceptor (11A) having an attracting surface (11a) that attracts and holds semiconductors, and an electrostatic chuck electrode (4) that is embedded within this susceptor. The susceptor (11A) is provided with a plate-shaped main body (3) and a surface corrosion-resistant layer (2) that faces the attracting surface (11a). The surface corrosion-resistant layer (2) is made from a ceramic material having magnesium, aluminum, oxygen and nitrogen as main ingredients, this ceramic material having as a main phase a magnesium-aluminum oxynitride phase which manifests a XRD peak when using CuK alpha radiation of at least 2? = 47 to 50 DEG . |