| abstract |
An apparatus and method for a gas distribution assembly are provided. In one aspect, an annular ring having an inner annular wall located at an inner diameter, an outer wall located at an outer diameter, an upper surface and a bottom surface; An upper recess formed inside the upper surface; A lip formed outward in the radial direction of the inner annular wall; And a sheet formed inside the inner annular wall; and an upper plate positioned in the upper recess, the disk-shaped body having a plurality of first holes formed therethrough, the first holes being the main body. A top plate, and a bottom plate positioned on the sheet, the top plate comprising a disk-shaped body that forms raised cylindrical bodies by extending beyond the surface of the substrate; A disc-shaped body having a plurality of second holes penetrated so as to be aligned with the first holes; And a plurality of third holes formed between the second holes and formed through the bottom plate, wherein the bottom plate is hermetically connected to the top plate, thereby connecting the plurality of first and second holes to the plurality of third holes. A gas distribution assembly is provided that includes a bottom plate; a plurality of third holes that fluidly isolate from the holes. |