http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452 |
| level | 10^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | C23C16/452 |
| modified | 2015-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before; introduction into the reaction chamber, e.g. by; or addition of reactive species |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 |
Incoming Links
Total number of triples: 3330.