http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010538165-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010538165-A |
| titleOfInvention | Method and apparatus for atomic layer deposition using atmospheric pressure glow discharge plasma |
| abstract | Apparatus and method for depositing an atomic layer on the surface of a substrate (6) in a processing space. There are gas supply devices (15, 16) for supplying various gas mixtures to the processing spaces (1, 2). This gas supply device (15, 16) reacts with a precursor material molecule through a reactive surface site to obtain a surface covered with a monolayer of precursor molecules attached to the surface of the substrate via the reactive site. Is configured to supply a gas mixture to the processing space along with the precursor material. Thereafter, a gas mixture is supplied that includes a reactant capable of converting the deposited precursor m-molecules into reaction precursor sites. A plasma generator (10) is provided for generating atmospheric pressure plasma in the gas mixture containing the reactants, and this plasma generator is arranged away from the processing space (1, 2). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9163310-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015519479-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014505369-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9329497-B2 |
| priorityDate | 2007-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.