http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1258914-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55eca0edf9b48342dfc1406c9dfd5bd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e68936d3fb435785c9dcd044cfe3b5d4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
| filingDate | 2001-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d42e9ac90b7041a80ad6b92bdb0307f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_614b2e46aee064a1750c7c34975facd3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc2f6941c28e174e3616b2b5050eb377 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0f181228046c98eb7179c47f81b0420 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_252cc79e6a66eefed977969abed68ebf |
| publicationDate | 2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1258914-B1 |
| titleOfInvention | Heating element cvd device |
| abstract | A heating element CVD device capable of providing a high productivity and decomposing and/or activating the material gas led into a processing container by a heating element and stacking film on a substrate disposed in the processing container, wherein the connection part area of the heating element to a connection terminal for connecting the hearing element to a power supply mechanism is not exposed to a space inside the processing container, specifically, the connection part area is covered by a cylindrical body or a platy body covering the connection part area while providing a space part thereof from the hearing element, or the connection part area allows the space part to be present in a space thereof from the connection terminal and is covered by the cylindrical body or platy body covering the connection part area while providing the space part in a space thereof from the heating element, and hydrogen gas is led from the connection terminal side into the processing container through the space part, whereby the portion of the heating element near the connection part to the power supply mechanism can be prevented from being deteriorated by the material gas, the material gas can be prevented from reacting with cleaning gas during the cleaning for removing the film adhered to the inside of the processing container, the service life of the heating element can be increased, and a film forming environment can be stabilized. <IMAGE> |
| priorityDate | 2000-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.