| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate |
2015-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0162f9152ebfbfa76848458e3923135d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96db0273cb5c1d803bc1020e7eea7f7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48be90ace4e7edd9a1ff247a56a23dbd |
| publicationDate |
2016-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201615883-A |
| titleOfInvention |
Method and system for in situ formation of gas phase compounds |
| abstract |
A system and method for providing an intermediate active to a reaction chamber is disclosed. The system includes an intermediate active material forming chamber fluidly coupled to the reaction chamber to provide an intermediate active to the reaction chamber. The pressure control device can be used to control the operating pressure of the intermediate active material forming chamber, and the intermediate active material forming chamber can be heated to a desired temperature using a heater. |
| priorityDate |
2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |