| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate |
1990-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e29e2c8de48e39bb07bcd282588c29c7 |
| publicationDate |
1991-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0422243-A1 |
| titleOfInvention |
Method of forming polycrystalline film by chemical vapor deposition |
| abstract |
A method of forming a polycrystalline deposit film from a hydrogen gas and a film-forming gas by chemical vapour deposition, which comprises the steps of: exciting the hydrogen gas by contact with an activation energy in a space other than a film-forming space of a film-forming chamber wherein a film-forming base is provided to thereby generate active species (H); introducing the active species (H) and the film-forming gas into the film-forming space at the same time but separate from each other; bringing the active species (H) into contact with the film-forming gas by mixing them in the film-forming chamber to form a plas-ma region in this chamber kept under a given pressure; and forming a film while periodically varying the density of distribution of the active species (H) near the surface of the base kept at a given temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2267291-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5704983-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0513634-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0526779-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5248378-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0513634-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2736361-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0601166-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0601166-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2267291-A |
| priorityDate |
1989-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |