| abstract |
In one embodiment, the plasma source is a first electrode, the first electrode configured to transport one or more plasma source gases through the first plurality of through holes therein, and the first electrode, An insulator disposed in contact with the first electrode around the outer edge of the electrode, and a second electrode, the first and second electrodes, and the insulator defining the plasma generating cavity; And a second electrode disposed in a state in which the outer edges of the two electrodes are in contact with the insulator. The second electrode is configured to move the plasma product from the plasma generation cavity through the second electrode toward the processing chamber. A power supply provides power across the first and second electrodes to ignite the plasma using one or more plasma source gases within the plasma generation cavity to generate a plasma product. One of the first electrode, the second electrode, and the insulator includes a port that provides an optical signal from the plasma. [Selection] Figure 1 |