| abstract |
An atomic layer deposition method of forming a solid thin film layer containing silicon. A substrate is loaded into a chamber. A first portion of a first reactant is chemisorbed onto the substrate, and a second portion of the first reactant is physisorbed onto the substrate. The physisorbed portion is purged from the substrate and the chamber. A second reactant is injected into the chamber. A first portion is chemically reacted with the chemisorbed first reactant to form a silicon-containing solid on the substrate. The first reactant is preferably Si[N(CH 3 ) 2 ] 4 , SiH[N(CH 3 ) 2 ] 3 , SiH 2 [N(CH 3 ) 2 ] 2 or SiH 3 [N(CH 3 ) 2 ]. The second reactant is preferably activated NH 3 . |