| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-84 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2007-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_945fb640f850d01426fab6881aa04fbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9db89b97eac2906d7fb11d5e4b09ef8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75b3ebc09b627c97b2034d3408281cdc |
| publicationDate |
2011-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7867914-B2 |
| titleOfInvention |
System and method for forming an integrated barrier layer |
| abstract |
An apparatus and method for forming an integrated barrier layer on a substrate is described. The integrated barrier layer comprises at least a first refractory metal layer and a second refractory metal layer. The integrated barrier layer is formed using a dual-mode deposition process comprising a chemical vapor deposition (CVD) step and a cyclical deposition step. The dual-mode deposition process may be performed in a single process chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9685371-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11694912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9842769-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013148490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636705-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11756803-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9330939-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10699946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11469113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581183-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013260555-A1 |
| priorityDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |