abstract |
First and second insulating layers in an EL device are respectively composed of Al 2 O 3 /TiOx:Ba laminated layers. The Al 2 O 3 /TiOx:Ba laminated layers are formed by alternately laminating Al 2 O 3 layers and TiO 2 layers added with Ba by an ALE method. Adding Ba into the TiO 2 layers mitigates a change in resistivity thereof with respect to a change in temperature. As a result, the EL device provides an excellent voltage withstanding performance which is stable against the changes in the temperature. |