| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2010-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38a6fe242528d23b8907872beafff79b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48711ce6298d8c1e6762759d7a13d715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6bd4aa3e5ceee9c096a9baeb594fcb7 |
| publicationDate |
2011-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7897208-B2 |
| titleOfInvention |
Low temperature ALD SiO2 |
| abstract |
The present invention generally comprises a silicon dioxide atomic layer deposition method. By providing pyridine as a catalyst, water may be utilized as the oxidization source while depositing at a low temperature. Prior to exposing the substrate to the water, the substrate may be exposed to a pyridine soak process. Additionally, the water may be co-flowed to the chamber with the pyridine through separate conduits to reduce interaction prior to entering the chamber. Alternatively, the pyridine may be co-flowed with a silicon precursor that does not react with pyridine. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9200365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11549181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11028478-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11670503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447865-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10023958-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9643844-B2 |
| priorityDate |
2006-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |