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publicationNumber EP-1860690-A2
titleOfInvention Process for producing silicon oxide films from organoaminosilane precursors
abstract A silicon oxide layer is deposited on a substrate by chemical vapor deposition (CVD) by reacting an organoaminosilane precursor, selected from specified categories, with an oxidizing agent under conditions for the formation of a silicon oxide film. Diisopropylaminosilane is the preferred organoaminosilane precursor for the formation of the silicon oxide film.
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