http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
Outgoing Links
Predicate | Object |
---|---|
concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
level | 14^^<http://www.w3.org/2001/XMLSchema#integer> |
symbol | H01L21/02219 |
modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
title | Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and nitrogen |
type | http://data.epo.org/linked-data/def/cpc/SubGroup |
broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208 |
Incoming Links
Total number of triples: 2634.