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publicationDate 2018-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018371612-A1
titleOfInvention Low Temperature Process for Forming Silicon-Containing Thin Layer
abstract The present invention relates to a method for forming a silicon-containing thin layer at a low temperature, and in particular, to a method for forming a silicon-containing thin layer by carrying out atomic layer deposition (ALD) at a low temperature.
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