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filingDate 2018-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e1eb5749b9648572e83a4dc6fabf4ab
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publicationDate 2021-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11075076-B2
titleOfInvention Method for manufacturing a semiconductor device and film deposition apparatus
abstract A method for manufacturing a semiconductor device is provided. In the method, impurities contained in a first layer formed on a substrate are removed by heating the first layer. On the first layer, a second layer is formed containing a component that forms a substance that is able to vaporize by reacting with the impurities.
priorityDate 2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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