http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150031186-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2014-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc6a30c43e66c9a6fb61d840a5f01fc5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_689862f67c997ad328f6acc75c1819d7 |
| publicationDate | 2015-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150031186-A |
| titleOfInvention | Method for producing silicon oxide film |
| abstract | A first gas supply unit for supplying a first gas toward the upper surface of the rotary table in the first processing zone; and a second gas supply unit for supplying a second gas toward the upper surface of the rotary table in the second processing zone, And a second gas supply unit are used for the silicon oxide film. In this method, a silicon-containing gas as a first gas is continuously supplied from a first gas supply unit, and hydrogen gas and an oxidizing gas as a second gas are continuously supplied from a second gas supply unit. Then, the first gas is adsorbed to the substrate placed on the rotary table in the first processing area while the rotary table is rotated, and the first gas adsorbed to the surface of the substrate in the second processing area and the first gas adsorbed to the surface of the substrate The second gas is reacted. |
| priorityDate | 2013-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.