patent/SG-11201703196W-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-11201703196W-A

Outgoing Links

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classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
filingDate	2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e25159862d33b96409a9f57a6fb2306f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9483d8500e1b2e28312965d6fd8a1eff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22fb72bc19e2d81b3d069bba7a9575dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0a95961468bab481d82c5aae94faa6c
publicationDate	2017-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	SG-11201703196W-A
titleOfInvention	Compositions and methods using same for deposition of silicon-containing films
priorityDate	2014-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541

Total number of triples: 38.