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filingDate 2019-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01a38b61d46964b33cfeb7918af223c3
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publicationDate 2020-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020075312-A1
titleOfInvention Methods For Making Silicon And Nitrogen Containing Films
abstract A composition and method for using the composition in the fabrication of an electronic device are disclosed. Compounds, compositions and methods for depositing a high quality silicon nitride or carbon doped silicon nitride.
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