| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2d3640a9de1b8f047673b310bbefeb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae481969e88911213886aefeb056b95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a298297c8dbd2ef250f3fd79d4143460
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21fcfbcd1ed8fa4fd394538f5a3cd79e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd849f8e279385eab0739ae98f881300
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c633fbac8e82f01a241d2d66facd674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2a2d3b2962540e24d65160ace2b9744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd387bf696d3166b630a637a35eca73d |
| publicationDate |
2014-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201441413-A |
| titleOfInvention |
Film forming apparatus, substrate processing apparatus, and film forming method |
| abstract |
The film forming apparatus configured to form a film on the substrate in a vacuum container includes a rotating table configured to revolve the substrate mounting region on which the substrate is placed; The region includes a processing gas supply unit configured to supply a processing gas to the substrate mounting region, and a layer of a molecular layer or an atomic layer is sequentially formed on the substrate in accordance with rotation of the rotating table to form a thin film; The slurry processing unit is a plasma generating region that is separated from the film forming region in the rotation direction of the rotating table, and is formed by using a plasma generated by plasma formation of a plasma generating gas. The atomic layer is subjected to a reforming process; the lower bias electrode is disposed on the lower surface side with respect to the height position of the substrate on the rotating table in order to pull the ions in the plasma to the surface of the substrate; the upper bias electrode a height position at the same height position or an upper side with respect to the height position; a high frequency power supply portion connected to the lower side bias electrode and the upper side bias electrode a lesser one for causing the lower bias electrode and the upper bias electrode to form a capacitive coupling via the plasma generating region to form a bias potential on the substrate; and an exhaust mechanism for the vacuum container Exhaust. |
| priorityDate |
2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |