patent/TW-I546407-B

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I546407-B

Outgoing Links

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classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
filingDate	2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2016-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2a2d3b2962540e24d65160ace2b9744 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae481969e88911213886aefeb056b95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21fcfbcd1ed8fa4fd394538f5a3cd79e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a298297c8dbd2ef250f3fd79d4143460 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd387bf696d3166b630a637a35eca73d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2d3640a9de1b8f047673b310bbefeb7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c633fbac8e82f01a241d2d66facd674 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd849f8e279385eab0739ae98f881300
publicationDate	2016-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	TW-I546407-B
titleOfInvention	Film forming apparatus, substrate processing apparatus, and film forming method
priorityDate	2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415818014 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID117625

Total number of triples: 41.