patent/SG-10202012631S-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-10202012631S-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11d738aa9b5b691f2f5094e7b819ac93
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02354 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02326 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
filingDate	2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96fdb8556c79e4a7ad32be99f5ee2a13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69cb17c37eda3068c9705eb809535711 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea00329ff86f935f71120d43cd84b30f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0a95961468bab481d82c5aae94faa6c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93ae76137d24467fb07db0d47f48dd9d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c29eda05e005232212897b368a5e388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9483d8500e1b2e28312965d6fd8a1eff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b728bd770ecb2a1bf474ab97e7042c4
publicationDate	2021-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	SG-10202012631S-A
titleOfInvention	Compositions and methods using same for carbon doped silicon containing films
priorityDate	2015-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123

Total number of triples: 38.