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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d03c782dc0d9dd6e8983b9f04f592c5e
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publicationDate 2022-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-115104178-A
titleOfInvention Ultra-low temperature ALD for forming high-quality Si-containing films
abstract A method for forming Si-containing films (eg, SiN films) by PEALD using trisilylamine (TSA) at ultra-low temperatures (eg, temperatures below 250° C.) is disclosed.
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