http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020248303-A1

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filingDate 2020-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020248303-A1
titleOfInvention Bottom-Up Growth of Silicon Oxide and Silicon Nitride Using Sequential Deposition-Etch-Treat Processing
abstract Methods for gapfill of high aspect ratio features are described. A first film is deposited on the bottom and upper sidewalls of a feature. The first film is etched from the sidewalls of the feature and the first film in the bottom of the feature is treated to form a second film. The deposition, etch and treat processes are repeated to fill the feature.
priorityDate 2017-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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