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filingDate 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202140837-A
titleOfInvention Low temperature steam free oxide gapfill
abstract Provided are methods of depositing a film in high aspect ratio (AR) structures with small dimensions. The method provides flowable deposition for seamless gap-fill, UV cure for increasing film density, film conversion to silicon oxide at low temperature, and film densification by low temperature inductively coupled plasma (ICP) treatment (<400 DEG C).
priorityDate 2020-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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