http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190055850-A

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filingDate 2017-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc08a0a245241c2fac9367e0ff3a6b62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_188defd48490e70eee1f39ee7ae27955
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publicationDate 2019-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190055850-A
titleOfInvention Carbon cross-linked aminosilane compounds for high growth silicon-containing films
abstract Compositions and methods for forming silicon oxide films are described herein. In one aspect, a film is deposited from one or more precursors, wherein the one or more precursors have a structure represented by the following formula A: Wherein R, R 1 , R 2 , R 3 , R 4 , and R 5 are defined herein.
priorityDate 2016-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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