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filingDate 2017-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101857478-B1
titleOfInvention Novel trisilyl amine derivative, method for manufacturing thereof and silicon-containing thin film use the same
abstract The present invention relates to a novel trisilylamine derivative, a method for producing the same, and a silicon-containing thin film using the trisilylamine derivative. The trisilylamine derivative of the present invention is a thermally stable, volatile and reactive compound, Type compound, it is possible to form a silicon-containing thin film having excellent physical and electrical characteristics and high purity by various deposition methods.
priorityDate 2014-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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