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filingDate 2019-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I700385-B
titleOfInvention Method of manufacturing thin film
abstract The present invention relates to a method of manufacturing a silicon-containing thin film. The method of manufacturing the silicon-containing thin film is able to be applied to atomic layer deposition (ALD) or chemical vapor deposition (CVD), and particularly, to be used in manufacturing a thin film with an excellent quality at a high process temperature..
priorityDate 2018-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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