| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f88d5bf4c9215ef46051fd740fbadf9d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J31-1616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 |
| filingDate |
2014-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f0ecfcb578854522b8a8fa57924892b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f456f7588c37ae24cb570fd0fbf075db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c6a4137731d209eb8167a717bc3e385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5d2d932bed0fd1f25bd748e56c95b5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_711e8cd53ee2f48c78b3c7bf201fd731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57d4706a9e1ac424d28bddd08d8d83cf |
| publicationDate |
2016-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3049499-A1 |
| titleOfInvention |
Amine substituted trisilylamine and tridisilylamine compounds |
| abstract |
Halogen free amine substituted trisilylamine and tridisilylamine compounds and a method of their preparation via dehydrogenative coupling between the corresponding unsubstituted tnsilylames and amines catalyzed by transition metal catalysts is described. This new approach is based on the catalytic dehydrocoupling of a Si-H and a N-H moety to form an Si-N containing compound and hydrogen gas. The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The -Si-N containing products are halide free. Such compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si containing films. |
| priorityDate |
2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |