| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07B2200-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-188
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate |
2016-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018524303-A |
| titleOfInvention |
Hydridosilapyrrole, hydridosilaazapyrrole, thiasilacyclopentane, process for preparing them, and reaction products therefrom |
| abstract |
Hydridosilapyrrole and hydridosilaazapyrrole are novel classes of heterocyclic compounds having silicon bonded to carbon and nitrogen atoms in the ring system and having one or two hydrogen atoms on the silicon atom It is. The above compound is represented by the formula (I) [wherein R is a substituted or unsubstituted organic group, and R ′ is an alkyl group]. These compounds can be used to produce silicon nitride or silicon carbonitride films by reacting with various organic and inorganic hydroxyl groups by ring-opening reactions. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11542284-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7321287-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022527624-A |
| priorityDate |
2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |