| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c9ed6d73bd3098e59561da0070b74583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24fc64b0ab062749e97030f4e297768a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73aeddf6b80f70ea84bb645d4f4edf75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b628c2832ce26f6dd27538cea9fa1b7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469 |
| filingDate |
2009-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65b6456629527fb85032f0a234389534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a88e6bf15d43a188ee3b3325c7bff42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de492aa94c4fd28b5fb676cca6103d74 |
| publicationDate |
2012-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8242029-B2 |
| titleOfInvention |
Method for forming a silicon dioxide/metal oxide-nanolaminate with a desired wet etch rate |
| abstract |
An atomic layer deposition-deposited silicon dioxide/metal oxide-nanolaminate, comprising at least one layer of silicon dioxide and at least one layer of a metal oxide, and having a wet etch rate in an etchant, said wet etch rate being either greater or smaller than both a wet etch rate of a film of silicon dioxide and a wet etch rate of a film of said metal oxide in said etchant. Also provided is a method for manufacturing the same. |
| priorityDate |
2009-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |