| abstract |
A class of liquid aminosilanes has been found that result in the production of silicon carbonitride films of the general formula Si x C y N z . These aminosilanes, unlike some precursors previously used, are liquid at room temperature and at pressures that allow for convenient handling. The invention also relates to a method of producing such a film.n n n The class of compounds and mixtures thereof is generally represented by the formula:n n n n n n n n Wherein R and R 1 typically represent an aliphatic group having from 2 to about 10 carbon atoms, for example alkyl, cycloalkyl, in which R and R 1 may be bonded to a cyclic group, and R 2 is A bond, (CH 2 ) n , a ring, or SiH 2 . |