patent/EP-3274354-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3274354-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbc6c7510b95e5953a5366f977036564
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02222
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02
filingDate	2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9628e29e9e90b0ddf91e8bd53db8af78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65eb693ae80d9d571b0b7893cb7c43bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa6ebfd4d1d65f1055b4e1057e7e681b
publicationDate	2018-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-3274354-A1
titleOfInvention	N-alkyl substituted cyclic and oligomeric perhydridosilazanes, methods of preparation thereof, and silicon nitride films formed therefrom
abstract	Novel N-alkyl substituted perhydridocyclic silazanes, oligomeric N-alkyl perhydridosilazane compounds, and N-alkylaminodihydridohalosilanes, and a method for their synthesis are provided. The novel compounds may be used to form high silicon nitride content films by thermal or plasma induced decomposition.
priorityDate	2015-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405630 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15910 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410579 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8909

Total number of triples: 27.