http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200090653-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9daca98ac07d1c93234d13f7306addb
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45542
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-068
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
filingDate 2020-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53eafbaf1d6df8671cfdf9bb10f8189d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80d0b6ef81e7787803ea8bd607913901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35a009f942ab39eee2a304fc9a085d06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84e29d9b855c871d6e6d34b2aa1e7e53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4ce2f4a0d06db8ab2307696498fa569
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e138bb85f887329b1887ffac3732624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f89d84543429fd3b451112fbb67e50b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b7f130b31e924829717fbe85f8eab3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2348ec29240d3594496cbd70d3098a1a
publicationDate 2020-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200090653-A
titleOfInvention Compositions for depositing silicon-containing thin films containing bis(aminosilyl)alkylamine compound and methods for manufacturing silicon-containing thin film using the same
abstract The present invention relates to a silicon-containing thin film deposition composition comprising a bis(aminosilyl)alkylamine compound and a method for manufacturing a silicon-containing thin film using the same, and more specifically, bis(amino) that can be usefully used as a precursor for a silicon-containing thin film. It relates to a composition for depositing a thin film containing silicon containing a silyl) alkylamine compound and a method for manufacturing a thin film containing silicon using the same.
priorityDate 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140143682-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016280724-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363985-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6071830-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154032491
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10473
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449751050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430243352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488277
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430243351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57587827
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431663776
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410540921
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426453095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449013872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57353436
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448372197
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099666
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12218
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139631
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID153913028
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415842140
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423091928
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290728
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23156929
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451256147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID429423994
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21840636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154051943
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455667478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12219
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154032492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863

Total number of triples: 106.