| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07B2200-07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-188
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08 |
| filingDate |
2016-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-108235705-B |
| titleOfInvention |
Hydridosilapyrrole, hydrosilazapyrrole, thiosilacyclopentane, their preparation method and obtained reaction product |
| abstract |
Hydridosilapyrroles and hydrosilazapyrroles are a new class of heterocyclic compounds in which the silicon is bonded to the carbon and nitrogen atoms of the ring system and the silicon atom has one or two hydrogen atoms. The compound is of formula (I); wherein R is a substituted or unsubstituted organic group and R' is an alkyl group. These compounds react with various organic and inorganic hydroxyl groups through ring-opening reactions, and can be used to produce silicon nitride or silicon carbonitride films. |
| priorityDate |
2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |