| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07B2200-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-188
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-068 |
| filingDate |
2016-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102065026-B1 |
| titleOfInvention |
Hydridosilapyrrole, hydridosilaazaprrole, thiasilacyclopentane, methods of preparation thereof and reaction products therefrom |
| abstract |
Hydridosilapyrrole and hydridosilaazaprol are a new class of heterocyclic compounds having one or two hydrogen atoms on silicon and silicon atoms bonded to carbon and nitrogen atoms in a ring system. The compound has formula (I): (I) In the above, R is a substituted or unsubstituted organic group, R 'is an alkyl group. These compounds react with various organic and inorganic hydroxyl groups by ring-opening reactions and can be used for the production of silicon nitride or silicon carbonitride films. |
| priorityDate |
2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |