| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f8c82cf932bd5acc32b6434f11b54d16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ff352fafdfd98bc593de28ea411a2ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bfddb5221084e0cd94947fb78057c36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bffbafbeba7752b0662dcb38f1f3d6f2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2011-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f00fccf29562d7acc43f5d3a25d365d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0051baa71eead03617d3b4d4d7be344
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0748e51045d5f52678f9d26862bf93f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae264dfd8427f5ce3d2dd904aa3d3a96 |
| publicationDate |
2011-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011112330-A2 |
| titleOfInvention |
REDUCED PATTERN LOADING USING BIS(DIETHYLAMINO)SILANE (C8H22N2Si) AS SILICON PRECURSOR |
| abstract |
Aspects of the disclosure pertain to methods of depositing dielectric layers on patterned substrates. In embodiments, dielectric layers are deposited by flowing BIS(DIETHYLAMINO)SILANE (BDEAS), ozone and molecular oxygen into a processing chamber such that a relatively uniform dielectric growth rate is achieved across the patterned substrate surface. The deposition of dielectric layers grown according to embodiments may have a reduced dependence on pattern density while still being suitable for non-sacrificial applications. |
| priorityDate |
2010-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |