| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1999-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57b68c28c9050cb94ef512cce8b5396d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50a8f58ed3604d6878d41dd7e56e6289 |
| publicationDate |
2001-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001156063-A |
| titleOfInvention |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
| abstract |
(57) Abstract: A method of manufacturing a semiconductor device including a process of manufacturing a silicon oxide film capable of forming a film at a low temperature is provided. A silicon oxide film is formed by thermal CVD using bis-tert-butylaminosilane and O 2 as source gases. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9640386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932413-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7166516-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8940648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103225070-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7875556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8912353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7875312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8383849-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008283051-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006351694-A |
| priorityDate |
1999-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |