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publicationDate 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201806081-A
titleOfInvention Method of forming metal interconnects and method of fabricating semiconductor device using the same
abstract A semiconductor manufacturing method comprising: depositing a low-k dielectric layer, forming a trench in the low-k dielectric layer, forming a barrier layer in the trench, filling a metal layer on the barrier layer, The metal is planarized and a cap layer is formed on the planarized metal, wherein the cap layer comprises at least two layers.
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