http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| level | 15^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L21/76856 |
| modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | After-treatment introducing at least one additional element into the layer by treatment in plasmas or gaseous environments, e.g. nitriding a refractory metal liner |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76855 |
Incoming Links
Total number of triples: 3164.