| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2791-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F299-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2791-001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-142 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2016-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a61e53769f8d13ed96746431120e6547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c234bce709d47dd2fc598088cea5da49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8acfc2d634c1456dbf61e2c791e488c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_094213bc64c3f8482cefa7de8eed50e9 |
| publicationDate |
2019-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3347768-B1 |
| titleOfInvention |
Method for selective etching of a block copolymer |
| priorityDate |
2015-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |