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publicationDate 2017-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9728450-B2
titleOfInvention Insulating a via in a semiconductor substrate
abstract Insulating a via in a semiconductor substrate, including: depositing, in the via, a dielectric layer; depositing, in the via, a barrier layer; allowing the barrier layer to oxidize; and depositing, in the via, a conducting layer.
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