| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40 |
| filingDate |
2006-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b6225077ff704e3c64f644568c30af8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faf03b9f9206278815761266d2470ab3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a53a9354291970b8991d550792609565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef780fe4d61d536bcd3b53e73fcf1c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af569163057934c916ecac41223ffd31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a97a9ca7bbafe66fa4059ff14d07fef5 |
| publicationDate |
2008-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7358612-B2 |
| titleOfInvention |
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance |
| abstract |
A method of manufacturing a semiconductor device contact including forming an insulating layer over a substrate and forming an agglutinating layer over the insulating layer. The agglutinating layer is then exposed to a plasma treatment. A barrier layer is formed over the plasma-treated agglutinating layer, and a conductive layer is formed over the barrier layer. |
| priorityDate |
2004-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |