| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1589736aaa911e693ec59356fce8fbc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_888a918f9e8e4b9256523d3e60025b40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3633010f48a9f9dae2bed925ce00eac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_577e0b8b92db630fd551a40a0b5a82e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a70fad4c7d23833318764c20c6e6374c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02697
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283 |
| filingDate |
2011-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a379a347cf15ec65506aa7b13c77dbba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62ee2debc60feab2ec2078e8d481d2ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8e8c3ac7d3fca276960b0503736d9d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36682c58e92b8cc238b8536cca8cfc58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ed3a1bf838c309c89f15217138ba316 |
| publicationDate |
2013-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8524600-B2 |
| titleOfInvention |
Post deposition treatments for CVD cobalt films |
| abstract |
Embodiments of the invention provide methods for forming materials on a substrate used for metal gate and other applications. In one embodiment, a method includes forming a cobalt stack over a barrier layer disposed on a substrate by depositing a cobalt layer during a deposition process, exposing the cobalt layer to a plasma to form a plasma-treated cobalt layer during a plasma process, and repeating the cobalt deposition process and the plasma process to form the cobalt stack containing a plurality of plasma-treated cobalt layers. The method further includes exposing the cobalt stack to an oxygen source gas to form a cobalt oxide layer from an upper portion of the cobalt stack during a surface oxidation process and heating the remaining portion of the cobalt stack to a temperature within a range from about 300° C. to about 500° C. to form a crystalline cobalt film during a thermal annealing crystallization process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11761086-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997362-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10699946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576901-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10192826-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018138125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10329663-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9540408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765601-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10157827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015157004-A1 |
| priorityDate |
2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |