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publicationDate 2017-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9847296-B2
titleOfInvention Barrier layer and structure method
abstract A method for forming a multilayer barrier comprises forming a conductive line over a substrate, depositing a dielectric layer over the conductive line, forming a plug opening in the dielectric layer, forming a multilayer barrier through a plurality of deposition processes and corresponding plasma treatment processes.
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