| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb9cd2af2f87dcf20b0fbbdfe79996e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2012-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_079f7b361a61c50ef0eb2d27c20949d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42eb023e79145947f718c44cb85af7b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4271c759eec31fe76e291fc9f2c56426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5995272754077232f67ea9e55ff490cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b67f8c11970f01069a391968bc348f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1174b13c86a9b39c07652dd99ba3b08a |
| publicationDate |
2016-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I541938-B |
| titleOfInvention |
Metal-containing and tantalum overlay for interconnection |
| priorityDate |
2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |