| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate |
2004-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8a451fba91c6882298fd7f23e21a327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5360aa370bc9dce1aa973d9c1e5d76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6953473d9d9ea3c2169964c2e95ccb56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6909112efa2c018c42c43f5d29940e |
| publicationDate |
2004-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004282084-A |
| titleOfInvention |
MOCVD of Ti-based barrier metal thin film using tetrakis (methylethylamino) titanium with octane |
| abstract |
PROBLEM TO BE SOLVED: To provide a MOCVD method of a Ti-based barrier metal thin film using tetrakis (methylethylamino) titanium together with octane. A method of forming a titanium-based barrier metal layer includes the steps of providing a substrate and forming an IC element on the substrate, the method comprising: forming about 5% by volume of tetrakis (methylethylamino); A) forming a titanium-based barrier metal precursor using a solution of titanium (TMEAT) and about 95% octane by volume; and depositing a titanium-based barrier layer on the substrate by MOCVD. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100622309-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023191361-A1 |
| priorityDate |
2003-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |