Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76876 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76861 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
filingDate |
2011-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5720112c3192d045a3bba428926c28a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb0fba44a4653e254027e222c54b1355 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37660544ea1c79c0f38175e0fd59f9c9 |
publicationDate |
2013-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201310534-A |
titleOfInvention |
Method for forming conductor pattern |
abstract |
A method of forming a conductor pattern is provided. A seed layer is formed on the bottom layer. A portion of the surface of the seed layer is irradiated with energy rays such that the seed layer includes a plurality of irradiated regions and a plurality of unirradiated regions. The irradiated area of the seed layer is subjected to a transformation treatment. A selective growth process is performed to grow the conductor pattern on the unirradiated areas of the seed layer. The irradiated regions of the seed layer are removed to electrically insulate the conductor patterns from each other. |
priorityDate |
2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |