| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8292741de96a44319670508be1f78f1a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8b19e8a73b30560f2a1ad8dfd5a6586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8606d2516cf35f78858bd477fbdc3071 |
| publicationDate |
2007-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2891084-A1 |
| titleOfInvention |
REALIZATION OF AN ALIGNED SELF-CONTAINING BARRIER |
| abstract |
A semiconductor product comprising a copper portion, a portion of a dielectric material, and a self-aligned barrier between the copper portion and the dielectric material portion. The self-aligned barrier comprises a first copper silicide layer comprising in majority first copper silicide molecules, and a second copper silicide layer comprising a majority of second copper silicide molecules. The proportion of the number of silicon atoms is higher in the second molecules than in the first molecules. |
| priorityDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |