http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201539577-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32816 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32348 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 2014-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5669766dbad0e860ece13373341e2962 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5f2f0797063404d816dd2d463bdf3ec |
| publicationDate | 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201539577-A |
| titleOfInvention | Processing device and method for producing active species |
| abstract | The processing apparatus of the present invention includes: a first active species generating unit having a first generating chamber, wherein the first active species is generated from the first gas containing the active species source by the silent discharge in the first generating chamber; and the second active species is produced The unit is disposed downstream of the first active species generating unit and has a second generating chamber, wherein the first active species is supplied from the first generating chamber, and the inductively coupled plasma and capacitor are used ???said at least one of the coupled plasma and the microwave plasma, the second active species is generated from the second gas containing the active species source; and the processing chamber is disposed downstream of the second active species generating unit, and the second generating species is used from the second generating species The first and second active species supplied from the chamber are subjected to treatment on the object to be treated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031214-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I739380-B |
| priorityDate | 2013-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.